Design and Operation of a 12 Cm Diameter, 750 Watt Microwave Plasma Source |
Common terms and phrases
12 cm source adjusted allow axially axis base braze ceramic characteristic coaxial line coils conducting conductor considered constructed continually copper core coupling structure cyclotron resonance cylindrical dense dependence Detailed determined developed disc effect electron temperature existence expected feedthrough FIGURE FLANGE fluctuation level frequency given heat helix high temperature input power inserted instabilities KOVAR Langmuir probe less Lisitano magnetic field magnetron measured ment meter microwave input MICROWAVE PLASMA SOURCE microwave power neutral observed obtained operation particular performance plasma column plasma density plot presented pressure previous source probe antenna probe characteristic problem produced radial position RADIUS range reflected power region relatively reliable result RIGID screen SCREW seen shown in Fig simple slots STAINLESS STEEL studied SUPPLY thesis transmission line typical University vacuum chamber variation various warm watts wave waveguide