Elemental Analysis of Ion Implanted Nanomaterials |
Common terms and phrases
analysis of ion as-implanted and electron Atomic Force Microscopy beam annealed sample channel numbers channelling RBS spectrum channelling spectra cm³ Depth nm depth profiles calculated determine the concentrations distance Horiz distance distance Vert distance Elastic Recoil Detection electron beam annealed Elemental analysis Energy MeV extracted from RBS Fe concentration Fe implanted fluence Fe implanted sapphire Fe ions Geological & Elemental Geological & Nuclear highest dose Horiz distance Vert implanted and annealed implanted and electron implanted Fe implanted ions Institute of Geological Ion Beam Analysis ion implanted nanomaterials ions cm-2 ions/cm² measurements were carried metal nanoparticles MeV Helium beam nanofeatures nanometre nitrogen implanted nm RZ Nuclear Reaction Nuclear Reaction Analysis obtained using 2.5 optical optoelectronic devices OWGS oxide material PIXE Random and channelling raster scanned RBS spectra Recoil Detection Analysis Rutherford Backscattering samples implanted SIMNRA fit simulations Surface distance Horiz Vert distance Angle wide deep holes X-ray Zinc oxide ZnO films ΑΙ