Particle Induced Electron Emission IThis monograph discusses collision-induced electron emission from nearly free-electron metals by ion or electron impact. This subject is, as is well known, of acute importance in understanding plasma-wall interactions in thermonuclear reactors. It is also the basis for one of the most exciting technological developments of the last few years - scanning electron miscroscopy. Several electron excitation mechanisms of electrons in the target are considered: excitation of single conduction and core electrons, excitation by plasmon decay and by Auger processes. Transport of inner excited electrons is simulated by the Boltzmann equation incorporating both elastic and inelastic collisions. The numerical calculation of scattering rates uses a dynamically screened Coulomb interaction. These results for the energy distributions of emerging electrons as well as the electron yield are compared with recent experimental measurements on electron emission from polycrystalline aluminum. |
Contents
Theory of Electron Emission from NearlyFreeElectron Metals | 1 |
Escape of Secondary Electrons | 8 |
Results for Aluminum and Comparison to Experimental Data | 9 |
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angle angular distribution Appendix approximation atomic backscattered Bloch Boltzmann equation Cailler calculated Chap conduction band contribution core electrons decay of plasmons Dehaes density dependent excitation function Devooght dielectric function Dubus E[eV elastic scattering electron excitation electron transport electron yield Energy dependent excitation energy distribution energy loss energy range escape evaluated excitation rate excited electrons Green's function Gryzinski Hasselkamp high primary energies IIEE inelastic collisions infinite medium inner excited interaction interband processes isotropic jellium loss function low energy mean free path NFE metals number of electrons obtained outgoing electron particle Phys plasmon damping plasmon decay potential primary beam primary electron proton PWEM Rösler and Brauer Rutherford cross section scattering cross section scattering function secondary electron Sect Shimizu slowing-down solid stopping power surface plasmons take into account target theoretical theory tion transport equation values wave number wave vector