Introductory MEMS: Fabrication and Applications
Introductory MEMS: Fabrication and Applications is a practical introduction to MEMS for advanced undergraduate and graduate students. Part I introduces the student to the most commonly used MEMS fabrication techniques as well as the MEMS devices produced using these techniques. Part II focuses on MEMS transducers: principles of operation, modeling from first principles, and a detailed look at commercialized MEMS devices, in addition to microfluidics. Multiple field-tested laboratory exercises are included, designed to facilitate student learning about the fundamentals of microfabrication processes. References, suggested reading, review questions, and homework problems are provided at the close of each chapter. Introductory MEMS: Fabrication and Applications is an excellent introduction to the subject, with a tested pedagogical structure and an accessible writing style suitable for students at an advanced undergraduate level across academic disciplines.
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abstract data type algebraic theory ALGOL 68 algorithm alphabet applied attributed grammar automata axioms binary block bound called carré cell Computer Science congruence consider construction context-free grammar context-free languages Corollary corresponding defined definition denote derivation tree deterministic domain DSPACE(log element equations equivalent ETOL systems example exists finite index finite set followk(A formal free monoid given grammar G graph Hence homomorphism idempotent implies induction input integer iterative algebra jump searching Lemma length Let G linear LL(k LR(k mapping monoid morphism multiset natural numbers node nondeterministic nonterminal normal form notation notion obtained operations optimal p-selective pair parser parsing partial function path PLL(k polynomial predicate problem production proof properties prove pushdown automaton recursively enumerable languages reduced relation relational algebra replaced result rules semantics sequence sequential stack string structure subset symbol tape terminal Theorem transformation Turing machine two-level grammar unique variables