Microlithography: Science and Technology

Front Cover
Kazuaki Suzuki, James R. Sheats, Bruce W. Smith
CRC Press, May 27, 1998 - Technology & Engineering - 800 pages
0 Reviews
This self-contained text details both elementary and advanced aspects of submicron microlithography - providing a balanced treatment of theoretical and operating practices as well as complete information on current research in the field. Including discussions on electron beam, x-ray, and proximal probe techniques and enhanced with timesaving citations to key sources in the literature and more than 600 tables, equations, drawings, and photographs that clarify the material, the book covers mechanical systems, optics, excimer laser light sources, alignment techniques and analysis, resist chemistry, processing, multilayer lithography, plasma and reactive ion etching, metrology, and more.
  

What people are saying - Write a review

We haven't found any reviews in the usual places.

Contents

System Overview of Optical Steppers and Scanners
1
The Lithographic Exposure System
2
Variations on a Theme
5
Chapter
9
Lithographic Light Sources
15
Optical Considerations
26
Latent Image Formation
30
The Resist Image
37
Krypton Fluoride Excimer Laser for Advanced
271
Alignment and Overlay
317
Electron Beam Lithography Systems
367
XRay Lithography
403
Resists and Processing
429
Photoresist Exposure
531
Postdevelopment Baking and Resist
561
Multilayer Resist Technology
567

Alignment and Overlay
43
Mechanical Considerations
55
Temperature and Environmental Control
72
Mask Issues
76
Control of the Lithographic Exposure System
83
Optical Enhancement Techniques
87
Lithographic Tricks
101
References
106
Optical Lithography Modeling
109
Optics for Photolithography
171
Wet DevelopmentDry Pattern Transfer Approaches
574
The Impact of Numerical Aperture
590
SilylationBased Processes for Surface Imaging
596
Use of Alternative Pattern Technology
607
Dry Etching of Photoresists
615
Metrology and Nanolithography
645
EBeam and Proximal Probe Processes
715
Index
777
Copyright

Common terms and phrases

References to this book

All Book Search results »

Bibliographic information