Proceedings of IEEE Sensors ..., Volumes 1-2IEEE, 2002 - Detectors |
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Common terms and phrases
accelerometer algorithm amplifier amplitude analog angle applications array ASIC beam bias bolometer calculated cantilever capacitance capacitor chip circuit CMOS coefficient coil components deflection detection detector developed device diaphragm diode displacement effect electrical electronic electronic nose element equation error etching experimental fabrication fiber film filter function gas sensors gyroscope heat IEEE increase input integrated interface laser layer linear magnetic field mass material measurement mechanical membrane MEMS metal method modulation MOSFET noise offset operation optical optical fiber oscillation output oxide packaging parameters performance phase piezoelectric piezoresistive piezoresistors polysilicon pressure sensor range refractive index resistance resistor resonant frequency response sample Schottky diode sensing sensitivity Sensors and Actuators shown in Figure shows signal processing silicon silicon nitride simulation structure substrate surface micromachining technique temperature thermal thickness tion transducer transistor unijunction transistor velocity voltage wafer waveguide wavelength