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001015 Wednesday June 8
CMOSBased Tactile Sensor for Coronary Artery
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13th International Conference Actuators and Microsystems angle aperture applications beads beam bonding bubble cantilever capacitive cell channel chemical chip CMOS coating concentration Conference on Solid-State deposition detection device diameter DRIE droplet electrical electrode electroformation electroplating electrostatic etching experimental fabrication process fiber Figure flow fluorescence frequency gas sensor heater heating IEEE integrated interface Japan June Keywords Korea laser layer liposomes liquid mask material measured mechanical membrane MEMS metal method micro microchannel microfluidic microlens micromachined microneedle microstructures mirror mixing needle optical optical fiber oxide parylene pattern PDMS performance photolithography photoresist plasma polymer pressure probe card Pyrex reaction resistance resonator sample scanning Schematic sensitivity Seoul shown in Fig shows signal silicon dioxide simulation slider Solid-State Sensors solution spin coating structure substrate surface technique temperature thermal thickness thin film transducers TRANSDUCERS'05 The 13th trench unimorph voltage wafer wet etching width