Ultraviolet laser technology and applications
Ultraviolet Laser Technology and Applications is a hands-on reference text that identifies the main areas of UV laser technology; describes how each is applied; offers clearly illustrated examples of UV opticalsystems applications; and includes technical data on optics, lasers, materials, and systems. This book is unique for its comprehensive, in-depth coverage. Each chapter deals with a different aspect of the subject, beginning with UV light itself; moving through the optics, sources, and systems; and concluding with detailed descriptions of applications in various fields.The text enables practicing engineers and researchers to utilize concepts and innovations to solve actual problems encountered in UV optical technology applications. It also offers a wealth of information for equipment designers and manufacturers.Those in laser fields (including medical, electronics, and semiconductors), students, engineers, technicians, as well as newcomers to the subject who require a basic introduction to the topic, will all find Ultraviolet Laser Technology and Applications to be an essential resource.
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ablation threshold absorbed absorption aluminum antireflection coatings applications Applied Physics argon atoms beam delivery beam splitters cause chemical circuit contamination crystal damage threshold deep-UV density deposition device dielectric discharge chamber dopant electron emission etching excimer laser excimer laser ablation excited exposure fabrication fluence fluoride glass heat imaging increase intensity interconnection ion implantation irradiation Journal of Applied lamps laser ablation laser annealing laser beam Laser Induced laser planarization laser pulse layer lens lithography magnesium fluoride manufacturing melting metal micromachining mirrors molecules Nd:YAG optical coatings optical elements optical system output oxide parameters particles pattern photons photoresist polyimide polymer produce radiation reactions reflection refractive index removal resist resolution schematic semiconductor shown in Figure silicon silicon dioxide solid spectral SPIE stampers stepper substrate temperature thermal thickness thin film transmission typical ultraviolet laser UV coatings UV laser cleaning UV optical UV photons vacuum wave wavelength