Microelectronic Structures and MEMS for Optical Processing, Volume 2881

Front Cover
SPIE--The International Society for Optical Engineering, 1996 - Microelectronics
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Contents

Commercializing MEMStoo fast or too slow? 288124
24
Statistical performance evaluation of electrostatic microactuators for a deformable mirror
35
Reflectivity of micromachined 111 oriented silicon mirrors for optical inputoutput
45
Copyright

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