Proceedings 2001: International Symposium on Microelectronics, October 9-11, 2001, Baltimore Convention Center, Baltimore, Maryland

Front Cover
Bruce Romenesko, International Microelectronics and Packaging Society, Society of Photo-optical Instrumentation Engineers
IMAPS, 2001 - Technology & Engineering - 782 pages
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Contents

Overview on CMOS MEMS Fabrication Tech Wireless Applications
1
MEMS in Aerospace Applications Thermal
7
MEMS in Space Science
14
Copyright

52 other sections not shown

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