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aberrations described actuator structure actuators adap adaptive optical system air gap amplitude anisotropic etching aperture Applied Optics approximation astigmatism beam propagation beam radius brane composite membranes contour control algorithm control voltage corrector defocus deformed mirror deposited device diffraction electrode fabrication field Figure flexible mirror G.V. Vdovin geometry grid Hartmann sensor implemented influence functions initial input aberrations integrated intensity distributions interferogram Interferometric Interferometric pattern iterations Journal of Quantum laser light beam LightPipes matrix mechanical membrane adaptive mirror membrane mirror microoptical mirror surface neural network nitride layer nitride membrane nonlinear obtained optical quality optimization optische output oxide P.M. Sarro phase reconstruction pinhole Poisson equation polysilicon Proc quality of correction Quantum Electronics rectangular reflecting surface RMS error S.A. Chetkin Sensors and Actuators shown in Fig simulation solid-state laser spatial light modulator spherical substrate Surface micromachined thickness tion tive mirror V.V. Apollonov vector wavefront correction wavefront sensor waveguide Zernike polynomials