Miniaturized Systems with Micro-optics and Micromechanics, Volume 3276

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SPIE--The International Society for Optical Engineering, 1998 - Integrated optics
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Contents

Optical measurement of LIGA milliengine performance 327602
28
Miniaturized fiber optical switches with nonmoving polymeric mirrors for tele
37
Design and fabrication of optical MEMS using a fourlevel planarized surfacemicromachined
48
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