Sensors and Materials, Volume 18Scientific Publishing Division of MYU, 2006 - Chemical detectors |
Contents
Research Reports | 63 |
Novel Method for InSitu Monitoring of Thickness of Silicon Wafer during Wet Etching | 71 |
Improvement of ThinFilm Multijunction Thermal Converters at KRISS S M 0632 | 83 |
Copyright | |
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accelerometer acoustic Actuators adhesion aldehydes applied bonding cavity cell concentration cell counters coating contact angle control volume CoTPP crack decreases deposited detection device diaphragm e-mail electrical electrode Epoxy etching evaluated experimental fabricated Figure frequency gas sensor gases gauge coefficients gauge factors heater heating IEEE immobilization immunosensor increased Korea layer magnetic powder measured mechanical membrane MEMS Metakaolin method micromachined monitoring MOSFET MYU Tokyo obtained optical fiber oxide oxygen p-type p-type polysilicon parameters peak penicillin performed piezoelectric piezoresistive piezoresistors plate polyester polymer polysilicon protein pulse tube cryocooler PZT films ratio reflectors resistance resistor response samples Sens sensing sensitivity Sensors and Materials shown in Fig shows signal simulation sol-gel solution specimen squeeze film structure substrate surface Technology temperature thermal thick-film resistor thickness thin film transducers ultrasonic University voltage wafer wet etching Young's modulus