Introduction to Microsystem Design (Google eBook)
Springer Science & Business Media, May 30, 2011 - Technology & Engineering - 344 pages
The book describes the design of micro systems systematically as well as the equations needed for an estimation of the basic elements. It can be used without knowing fabrication processes of micro systems and provides the basic equations needed to calculate the effects and forces which are important in micro systems. For quick reference equations are presented in tables which are found in an index at the end of this book.
What people are saying - Write a review
We haven't found any reviews in the usual places.
Strain Gauges on Membranes
Analogies of Physical Domains
Mechanical Devices for Electronics
achieved actuator anemometer approximately beam clamped bimorph calculated capacitor carrier characteristic curve circular membrane compressive stress conductor path constant counter pressure cross-section š Ž dead volume deflection w0 density distance Dp ¼ Dpmax DVmax effect electrical electrical resistance electrodes employed energy output feed channels flow rate flow velocity fluid fluidic heat heat conductivity heater hydraulic diameter inlet larger layer length linear liquid maximum deflection measured membrane membrane deflection micropump microtechnique microvalve needs neutral fiber outlet valve output voltage parameters piezo piezoelectric piezoelectric effect Poisson’s ratio polyimide pressure difference pressure drop pressure sensor radius refractive index residual stress resistance change resonance frequency respectively seismic mass shown in Fig shows silicon strain gauges stroke substrate surface switching temperature changes thermal thickness thin film thin membrane transversal valve body valve seat vibrating viscosity voltage waveguide width Young’s modulus zero