Introduction to Microsystem Design (Google eBook)

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Springer Science & Business Media, May 30, 2011 - Technology & Engineering - 344 pages
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The book describes the design of micro systems systematically as well as the equations needed for an estimation of the basic elements. It can be used without knowing fabrication processes of micro systems and provides the basic equations needed to calculate the effects and forces which are important in micro systems. For quick reference equations are presented in tables which are found in an index at the end of this book.
  

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Contents

Introduction
2
Scaling Laws
4
Elastic Deformations
6
Thin Films
9
Conductor Paths
21
Membranes
28
Strain Gauges on Membranes
53
Beams
65
Microoptics
177
Diffusion
190
Microvalves
203
Micropumps
229
Microdosing
251
Analogies of Physical Domains
253
Mechanical Devices for Electronics
261
Pressure Sensors
274

Vibrations
85
Capillaries
107
Capacitive Forces
131
Piezoelectric Effect
137
Thermal Actuators
159
Flow Sensors
289
Inertial Sensors
303
References
310
Index
316
Copyright

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About the author (2011)

Univ.-Prof. Dr. Werner Karl Schomburg was born in 1955 at Kiel, Germany. In 1983 he got his diploma in theoretical physics from Kiel University. He stayed at CERN in Geneva, Switzerland, for 3 month in 1982. He obtained his PhD from a university at Munich (LMU) in experimental nuclear physics in 1988. Until 2003 Prof. Schomburg was working at Karlsruhe Research Center, Institute of Micro Structure Technique. His group developed in this time the first micro pump, the first micro valve, and the first micro flow and micro pressure sensor from polymer. In 2004 he became a professor at RWTH Aachen University. From 2006 to 2009 he spent 3 weeks each year teaching at Tsinghua University in Beijing, China.

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