Materials science of microelectromechanical systems (MEMS) devices: symposium held December 1-2, 1998, Boston, Massachusetts, U.S.A.

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Materials Research Society, 1999 - Technology & Engineering - 246 pages
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Contents

Recent Developments in Experimental and Theoretical
3
Influence of Specimen Size and SubMicron Notch on
15
Dependence of Silicon Fracture Strength and Surface
21
Copyright

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