Fundamentals of Microfabrication: The Science of Miniaturization, Second Edition

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CRC Press, Mar 13, 2002 - Technology & Engineering - 752 pages
6 Reviews
MEMS technology and applications have grown at a tremendous pace, while structural dimensions have grown smaller and smaller, reaching down even to the molecular level. With this movement have come new types of applications and rapid advances in the technologies and techniques needed to fabricate the increasingly miniature devices that are literally changing our world.

A bestseller in its first edition, Fundamentals of Microfabrication, Second Edition reflects the many developments in methods, materials, and applications that have emerged recently. Renowned author Marc Madou has added exercise sets to each chapter, thus answering the need for a textbook in this field.

Fundamentals of Microfabrication, Second Edition offers unique, in-depth coverage of the science of miniaturization, its methods, and materials. From the fundamentals of lithography through bonding and packaging to quantum structures and molecular engineering, it provides the background, tools, and directions you need to confidently choose fabrication methods and materials for a particular miniaturization problem.

New in the Second Edition
  • Revised chapters that reflect the many recent advances in the field
  • Updated and enhanced discussions of topics including DNA arrays, microfluidics, micromolding techniques, and nanotechnology
  • In-depth coverage of bio-MEMs, RF-MEMs, high-temperature, and optical MEMs.
  • Many more links to the Web
  • Problem sets in each chapter
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    Madou is very thorough in the coverage of material in the fabrication of MEMs. He writes clear explanations of the processes and the factors of these processes. This book is extensive and comprehensive.

    User Review - Flag as inappropriate

    Good book for starters and upto high level graduates clear understanding of the concepts

    Contents

    Chapter
    1
    Chapter
    10
    Chapter 2
    77
    Chapter 3
    123
    Chapter 4
    183
    Wet Isotropic and Anisotropic Etching
    206
    Chapter 5
    259
    Surface Micromachining Modifications Not Involving Polysilicon
    287
    Packaging
    478
    Sample Preparation in Molecular Diagnostics
    512
    Substrate Choice
    518
    Chapter 9
    535
    Miniaturization Applications
    615
    Appendix
    669
    Appendix
    671
    Appendix
    685

    Chapter 6
    325
    Chapter 7
    379
    Chapter 8
    467

    Common terms and phrases

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