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Study of Diamond Like Carbon as Template for Nanoimprint Lithography and as ...
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LATERAL OVERGROWTH OF DIAMOND FILMS ON METAL MASKED
LOW TEMPERATURE GROWTH OF ALIGNED CARBON NANOTUBES
LOW HYDORGEN CONTENT HYDROGENATED AMORPHOUS CARBON
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a-C:H films adhesion amorphous carbon annealed anode Appl atoms band gap bias bonds calculated carbon films carbon nitride films cathode chemical vapor deposition coefficient component contact angle crystalline crystallites CVD diamond decrease diamond films diamond-like carbon DLC films E-mail electron equation etching experimental field emission Figure film prepared films deposited flow rate fraction function graphite growth hydrogen increase infrared inter-round couplings interface investigated layer Lett magnetic magnetron material measurements mechanical multiply-twisted helix Nanyang Technological University nitride thin films nitrogen observed obtained oxidation parameters peak PECVD Phys PL intensity plasma pressure properties Raman spectra room temperature sample Scientific Publishing Company shown in Fig shows silicon carbide spectroscopy spectrum stochastic stress structure substrate substrate temperature surface energy surface roughness ta-C films target technique thermal conductivity voltage wavelength World Scientific Publishing X-ray x-ray photoelectron spectroscopy Young's modulus