Excimer Laser Technology (Google eBook)

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Springer Science & Business Media, Dec 5, 2005 - Technology & Engineering - 454 pages
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This comprehensive survey on Excimer Lasers investigates the current range of the technology, applications and devices of this commonly used laser source, as well as the future of new technologies, such as F2 laser technology. Additional chapters on optics, devices and laser systems complete this compact handbook. A must read for laser technology students, process application researchers, engineers or anyone interested in excimer laser technology. An effective and understandable introduction to the current and future status of excimer laser technology.
  

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Contents

2
33
Principles of Excimer Lasers
41
Design and Technology of Excimer Lasers 47
46
Specially Designed Excimer Lasers
75
Excimer Lasers for Microlithography
89
Laser Beam Characterization 105
104
Optical Coatings for Excimer Laser Applications
119
Small Structures with Large Excimer Lasers
127
Ablative MicroFabrication
149
References
199
F2Laser Microfabrication for Photonics
220
NanoStructuring
279
Material Modification
295
ExtremeUltraviolet EUV Technology
398
List of Abbreviations
423
Copyright

Overview 139
138

Common terms and phrases

Bibliographic information