Excimer Laser Technology (Google eBook)
Springer Science & Business Media, Dec 5, 2005 - Technology & Engineering - 454 pages
This comprehensive survey on Excimer Lasers investigates the current range of the technology, applications and devices of this commonly used laser source, as well as the future of new technologies, such as F2 laser technology. Additional chapters on optics, devices and laser systems complete this compact handbook. A must read for laser technology students, process application researchers, engineers or anyone interested in excimer laser technology. An effective and understandable introduction to the current and future status of excimer laser technology.
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Principles of Excimer Lasers
Design and Technology of Excimer Lasers 47
Specially Designed Excimer Lasers
Excimer Lasers for Microlithography
Laser Beam Characterization 105
Optical Coatings for Excimer Laser Applications
Small Structures with Large Excimer Lasers
F2Laser Microfabrication for Photonics
ExtremeUltraviolet EUV Technology
List of Abbreviations
ablation rate ablation threshold absorption achieved Appl applications beam profile birefringence CaF2 channels chip circuit coatings components density depth diameter dielectric diffraction drilling efficiency electrical electrode electron emission etch EUV source excimer laser excitation exposure F2-laser fabrication fiber fiber Bragg gratings films fluence fluorine fused silica glass Göttingen grating hole homogenizer Ihlemann imaging index change irradiation KrF laser Lambda Physik laser ablation laser applications laser beam laser energy laser fluence laser pulses laser radiation laser systems laser-induced layer lens Lett light lithography manufacturing micro microfluidic microlithography micromachining mirrors modulation numerical aperture optical fiber output parameters pattern photon Phys plasma polyimide polymers precision preionization Proc pulse distance pulse energy refractive index repetition rate resolution sample semiconductor shock wave shown in Fig spectral SPIE stability structures substrate surface switching target technique thermal thickness thyratron tion typical voltage wafer waveguides wavelength width XeCl laser