A Manual Wafer Probe Station for an Integrated Circuit Test System, Volume 13 |
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Common terms and phrases
50 REAM Adjusting screw ALLEN CAP SCREW ALLEN HEAD CAP ALUM BAUSCH BRASS Bureau of Standards cards or individual Carver and W. A. chuck base Circuit Test System COMPUTER SCIENCES double lip DRILL & C'T'BORE Federal Information Processing feedthrough connector following centers G. P. Carver Government HOLES 50 identified in figure Information Processing Standards Integrated Circuit Test manual wafer probe Mechanical drawings microelectronic test structure micrometer head micropositioners microscope illuminator Mounting plate screw National Bureau National Engineering Laboratory National Technical Information physical and chemical plate 18 probe assembly probe card holder probe card plate probe pads probe plate REAM FOR REF reports ring Roller set holder science and technology Semiconductor Measurement Technology shown in figures spacers Springfield TAP 2 HOLES Technical Information Services test pattern translatable vacuum chuck translation stages W. A. Cullins Electron wafer chuck wafer probe station wafer-level testing X-Y MOVEMENT x-y translator