Proceedings of IEEE Sensors ..., Volumes 1-2IEEE, 2003 - Detectors |
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accelerometer acoustic algorithm amplifier amplitude analysis applications beam beamforming bias calibration cantilever capacitance capacitor channel chemical chip circuit CMOS coefficients components detection detector device diode electrical electrode element environment error ESPDA experimental fabricated filter function gas sensor IEEE increase input integrated interface laser layer linear liquid measurement MEMS method microbolometers microcontroller microfluidic microlenses micromachined microsystem modulation noise operation optical oscillator output oxide parameters pattern performance photodiode piezoelectric piezoresistive pixel polyimide polymer pressure pulse PVDF quartz range ratio resistance resonance frequency response sample sensing sensitivity sensor array sensor networks sensor nodes Sensors and Actuators shown in Figure shows signal silicon simulation SPIHT structure substrate surface Surface Acoustic Wave technique Technology thermal thickness thin film tion transducer ultrasonic University values viscosity voltage wavelength wireless sensor networks