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25th harmonic Airy disk approximately argon atom attenuation axis beam waist calculated coherent coupled demonstrated dielectric capillary waveguide driving laser pulse electric field experimental femtosecond Figure focal spot focusing free-space gas fill gas pressure gas target gases gaussian gaussian beam harmonic output high-harmonic high-order harmonic hollow capillary waveguide hollow dielectric capillary hot spots hydrogen inside the waveguide ionization potential krypton laser field laser focus laser output laser system lasing length main driving pulse main pulse measured multimode excitation on-axis optical output power parameters phase constant phase velocity phasematching experiment Phys pinhole cell plasma Pockels cell polarizer pre-plasma prepulse pressure tuning curves pulse energy radius refractive index regenerative amplifier region result Rundquist spectra spectrum Ti:Sapphire laser torr transmission tunnelling ionization wave plate waveguide entrance face waveguide phasematching wavelength waveplate waveplate angle Xe IX laser xenon IX laser xenon laser XUV laser XUV output XUV radiation