Gas Source Molecular Beam Epitaxy: Growth and Properties of Phosphorus Containing III-V HeterostructuresThe first book to present a unified treatment of hybrid source MBE and metalorganic MBE. Since metalorganic MBE permits selective area growth, the latest information on its application to the INP/GaInAs(P) system is presented. This system has been highlighted because it is one of rising importance, vital to optical communications systems, and has great potential for future ultra-highspeed electronics. The use of such analytical methods as high resolution x-ray diffraction, secondary ion mass spectroscopy, several photoluminescence methods, and the use of active devices for materials evaluation is shown in detail. |
Contents
Chemistry | 14 |
Metalorganics Metalorganic | 39 |
The Generation of Atomic and Molecular Beams | 55 |
Copyright | |
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Gas Source Molecular Beam Epitaxy: Growth and Properties of Phosphorus ... M. B. Panish,H. Temkin No preview available - 1993 |
Common terms and phrases
active layer AlGaAs AsH3 atomic band bandgap base beam epitaxy bias bipolar transistors calculated capacitance composition compounds conduction band crystal current gain decomposition density dependence devices diffraction diffusion diodes discussed dopant doping doping level effusion cells electron emission emitter energy equilibrium ESMBE etching exciton flux function GaAs GaAs/AlGaAs GaInAs GaInAs/InP GaInAsP gas source grown by HSMBE growth rate growth temperature GSMBE heterostructure hole hydrides III-V illustrated in Fig increase interface lasers lattice matched layer thickness liquid liquidus mask MBE system measured metalorganic MOCVD molecular beam Molecular Beam Epitaxy n-type observed obtained optical oxide p-n junction Panish partial pressure peak photocurrent Phys plotted quantum quantum wire quaternary range ratio region RHEED sample Sect semiconductor shown in Fig solid spectra strain structures substrate temperature superlattice surface ternary thermal threshold current transition valence band vapor pressure voltage wafer waveguide wavelength width