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aberrations accuracy alignment angle aperture applications array astigmatism automatic axis beam splitter beamsplitter calibration camera circuit board component contour coordinate curvature curve detector diameter diffraction dimensional dimensions direction displacement distance distortion electro-optical electronic error Experimental focus fringe centers function gaging system geometrical image dissector inches injector barrel input inspection interference pattern interferogram interferometer laser laser beam lateral cells lens light linear master grating measurement mechanical method metrology microdensitometer microprocessor modulator moire monitor non-contact obtained operation optical head optical system output phase photoconductors photodetector photodiode photographic plane plot point spread function position sensors probe pulses razor band reference reflected Ronchi test sample scan servo system shear shown in Figure signal slope spatial frequency speed spherical spot stylus stylus instrument surface finish surface profile technique test optics tilt Twyman-Green interferometer variations voltage wavefront Zygo Corporation