47 pages matching excimer laser in this book
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CERAMICS AND POLYMERS
ABLATION AND PLASMAS
2 other sections not shown
ablation absorption Appl atoms bonds calculated cavitation ceramics Chem chemical Chemical Vapor Deposition CO2 laser compound configuration crystallites decrease deposition detected detector diameter dipoles distance dye laser emission equation excimer laser excimer laser processing excited experimental field Figure film thickness flux formation heat increase induced intensity interaction interface ionization irradiation kinetic Knudsen layer KrF excimer laser laser beam laser cladding laser fluence laser irradiation laser power laser pulses laser radiation laser spot laser-induced mass material mbar measured melt pool metal molecules monomer nitride nitrogen observed obtained optical oxide parameters particles peak photodiode photolysis photon photoresist Phys plasma plume polariton polyimide polymer polymerization pressure produced reaction resonance sample scattering sensor response shown in Fig signal silane silicide silicon silicon oxide simulations spectra spectroscopy spectrum stoichiometric substrate substrate temperature surface polariton target technique thermal thin values vapor velocity wavelength