ADV ELECTRONICS ELECTRON PHYSICS, Volume 83 (Google eBook)

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Academic Press, Aug 17, 1992 - Computers - 281 pages
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Contents

Chapter 2 NanometricScale Electron Beam Lithography
107
Chapter 3 LVSEM for High Resolution Topographic and Density Contrast Imaging
203

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Page 18 - A detailed consideration of all these effects is beyond the scope of this chapter, and the interested reader is referred to specialist texts on the topics concerned [eg, 1 7.
Page 1 - EB is measured from the bottom of the conduction band or the top of the valence band, as appropriate.
Page 16 - Kelvin, n is the atomic volume in cm3, £2 is the atomic volume in cm3, D is the surface diffusion coefficient in cm2/s, R is the tip radius in cm, y is the surface tension in ergs/cm2, and F is the electric field in V/cm. Also, note from Gomer [13] that F % V/5R.

About the author (1992)

Xerox Corporation, Palo Alto, California

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