Sensors update, Volume 12

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Wiley-VCH, 2003 - Science - 262 pages
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Sensors Update ensures that you stay at the cutting edge of the field. Built upon the series Sensors, it presents an overview of highlights in the field. Coverage includes current developments in materials, design, production, and applications of sensors, signal detection and processing, as well as new sensing principles.
Each volume is divided into three sections. Sensor Technology, reviews highlights in applied and basic research, Sensor Applications, covers new or improved applications of sensors, Sensor Markets, provides a survey of suppliers and market trends for a particular area. With this unique combination of information in each volume, Sensors Update will be of value for scientists and engineers in industry and at universities, to sensors developers, distributors, and users.

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Sensors Update, Volume 9
Sensors Update, Volume 9. H Baltes, J Hesse and jg Korvink (ed) 2002 Meas. Sci. Technol. 13 643 doi:10.1088/0957-0233/13/4/701 ... EJ/ abstract/ 0957-0233/ 13/ 4/ 701

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Sensors, Update 13
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About the author (2003)

Henry Baltes is Professor of Physical Electronics at ETH Zurich since 1988. He is the Director of the Physical Electronics Laboratory active in CMOS-based bioelectronic, chemical, and physical micro and nano sensor systems and a co-founder of the spin-off company SENSIRION. He held visiting appointments at Stanford University, the University of Waterloo, Ritsumeikan University, the University of Bologna, and the University of Freiburg.
Prior to 1988, he held the Henry Marshall Tory Chair at the University of Alberta, where he was Acting President of the Alberta Microelectronics Centre and co-founder and Director of LSI Logic Corporation of Canada. From 1974 to 1982 he worked for Landis & Gyr Zug (now Siemens) Switzerland, where he directed the solid-state device laboratory. He received the D. Sc. degree from ETH Zurich in 1971.
Henry Baltes is a Fellow of the IEEE and a Member of the Swiss Academy of Technical Sciences. He received the European Science Award of the Koerber Foundation, the Wilhelm Exner Medal of the Austrian Trade Association, and honorary doctoral degrees of the University of Waterloo and the Alma Mater Studiorum University of Bologna.

Oliver Brand is an Associate Professor in the School of Electrical and Computer Engineering at the Georgia Institute of Technology, Atlanta, USA. He received his diploma degree in Physics from Technical University Karlsruhe, Germany in 1990, and his Ph.D. degree (Doctor of Natural Sciences) from ETH Zurich, Switzerland in 1994. Between 1995 and 2002, he held research and teaching positions at the Georgia Institute of Technology (1995-1997) and ETH Zurich (1997-2002).
Dr. Brand has co-authored more than 100 publications inscientific journals and conference proceedings and two books. His research interest is in the areas of CMOS-based micro- and nanosystems, MEMS fabrication technologies, and microsystem packaging. Dr. Brand is on the editorial board of Sensors and Materials and has served on the program committees of a number of conferences, including MEMS and Eurosensors.

Gary K. Fedder is a Professor at Carnegie Mellon University where he holds a joint appointment with the Department of Electrical and Computer Engineering and the Robotics Institute. He received the B.S. and M.S. degrees in electrical engineering from MIT in 1982 and 1984, respectively. From 1984 to 1989, he worked at Hewlett-Packard on a VLSI IC tester and on modeling printed-circuit-board interconnect for high-speed computers. He received his Ph.D. in 1994 from U.C. Berkeley, successfully demonstrating the first microstructure with sigma-delta multi-mode electrostatic servo control. He is a subject editor for IEEE J. MEMS and on the editorial board of IoP J. Micromech. and Microengineering. Professor Fedder's research interests include microelectromechanical systems (MEMS) modeling, simulation and synthesis, integration of MEMS and CMOS, microsensor design, microactuator control systems, and probe-based data storage.

Christofer Hierold holds the Chair of Micro- and Nanosystems at the ETH in Zurich, Switzerland, since April 2002. Prior to that, he spent eleven years with Siemens AG and Infineon Technologies AG, responsible for R&D on microsystems, advanced CMOS processes, memories, nanoelectronics and new materials. During his time in industry, his major research and development achievements were in the field of CMOS compatiblemicrosystems, such as fully integrated, surface micromachined intelligent CMOS pressure sensors and fingertip sensors. His current research work focuses on the evaluation of new materials for MEMS, on advanced microsystems and on nanotransducers.
Professor Hierold holds numerous patents and has published over 20 research articles in peer reviewed journals and international conference proceedings. He served on the program committees of several scientific conferences, MEMS and IEDM amongst others, and is also in the International Steering Committee of the European Conference on Solid-State Transducers.

Jan G. Korvink holds a Chair for Microsystem Technology at Albert Ludwig University in Freiburg, Germany, where he runs the laboratory for microsystem simulation and also serves as the Dean of the Faculty of Applied Science. Prior to that, he worked at the Physical Electronics Lab, Institute for Quantum Electronics of the ETH Zurich, where he built up and led the microsystem modelling effort. Three of the MEMS simulation programs that were developed by him and his group during this time were successfully commercialized. He has co-authored more than 100 papers in scientific journals and conference digests, as well as numerous book chapters and a book on semiconductors for engineers.
He stayed at Ritsumeikan University in Shiga, Japan, and the ETH Zurich as visiting professor, served as European editor for Sensors and Materials and on both the IEE MEMS and IEEE IEDM committees.
Professor Korvink currently serves on the committees of a number of conferences related to MEMS, including Eurosensors, DTIP, ESSDERC, and the MSM. His research interests cover the modeling andsimulation of microsystems and the low cost fabrication of polymer-based MEMS.

Osamu Tabata received his M.S. and Ph.D. degrees from Nagoya Institute of Technology, Nagoya, Japan, in 1981 and in 1993, respectively. From 1981 to 1996, he performed industrial research at Toyota Central Research and Development Laboratories, Inc., in Aichi, Japan. In 1996, he joined the Department of Mechanical Engineering of Ritsumeikan University in Shiga, Japan. He spent three months each as Guest Professor at the Institute of Microsystem Technology, Freiburg University, Germany, in 2000 and at ETH Zurich, Switzerland, in 2001. In September 2003, he joined the Department of Mechanical Engineering, Kyoto University, Kyoto, Japan.
Professor Tabata is currently engaged in the research of micro/nano processes, the LIGA process, MEMS and micro/nano system synthetic engineering (SENS). He serves as an associate editor of J. MEMS and is on the editorial boards of several journals, and a program committee member of numerous international conferences.
He was honored with the Science News Award in 1987, Presentation Paper Award in 1992, and received the R&D 100 Award in 1993 and 1998.

Tamara Bechtold earned her Dipl.-Ing. degree in electrical engineering and microsystem technology at the University of Bremen, Germany in 2000 and her Dr. Ing. in microsystem simulation at the Institute of Microsystem Technology (IMTEK) in Freiburg, Germany in 2005. Currently, she is working at IMTEK as a post-doctoral researcher. Her research interests include the application of model order reduction to MEMS problems and their efficient system-level simulation.

Evgenii B. Rudnyi graduated from Moscow State University (MSU), Department of Chemistry in 1981, diploma (equiv. M.Sc.) in Chemistry. He received the Candidate of Science (equiv. Ph.D.) degree in physical chemistry in 1985. Dr. Rudnyi was a Research worker, Assistant Professor, and Associated Professor at the Chemistry Department of MSU from 1985 to 2000 and a guest scientist at the National Institute of Standards and Technology (USA) in 1991. Currently, he is working at the Institute of Microsystem Technology (IMTEK) in Freiburg, Germany, as a senior scientist. He is actively involved in the application of model reduction to MEMS problems. He is an author of software mor4ansys that performs model reduction directly for ANSYS models.

Jan G. Korvink earned his Master of Science in computational mechanics at the University of Cape Town, South Africa and read his doctorate at the Swiss Federal Institute of Technology (ETH) in Zurich (Dr. sc. techn. in applied computer science). After he had built up and lead the Microsystem Modeling Group at the Physical Electronics Laboratory, Institute for Quantum Electronics at the ETH he was called upon to join IMTEK (Institute for Microsystem Technology) at the Albert LudwigUniversity of Freiburg, Germany to hold the Chair of Microsystem Simulation. He is now a vice-dean and chairman of the examination board at the Faculty of Applied Sciences to which IMTEK belongs. Prof. Korvink is author or co-author of more than 130 publications in the field of microsystems and joint-editor of "Advanced Micro and Nanosystems" [http: //]. Prof. Korvink is a member of the technical programe committees of several conferences and is a member of ASME. He has been visiting professor at the ETH Zurich, the Ritsumeikan University of Kusatsu, Japan and visiting scientist at the Kyoto University in Kyoto, Japan. His research activities focus on the development of ultra low-cost methods of MEMS production and the modeling for and simulation of micro- and nanosystems.

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