Report of Research Center of Ion Beam Technology, Hosei University: Hōsei Daigaku Ion Bīmu Kōgaku Kenkyūjo Hōkoku. Bessatsu. Supplement, Issues 9-11

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The Center, 1991 - Ion bombardment
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Contents

THE PRESENT STATUS AND PROSPECT OF DIGITAL INTEGRATED
1
CURRENT STATUS AND FUTURE OF Si LSI TECHNOLOGY
7
THREE DIMENSIONAL ANALYSIS BY FOCUSED ION BEAM
15

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