Synthetic Diamond: Emerging CVD Science and Technology

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Karl E. Spear, John P. Dismukes, Electrochemical Society
John Wiley & Sons, 1994 - Science - 663 pages
2 Reviews
The hardest known material and the premiere thermal conductor at room temperature, diamond resists heat, acid, and radiation, is a good electrical insulator but can be doped to form p- and n- type semiconductors, and has the highest known figure of merit for power semiconductor applications. Diamond is transparent to both visible and infrared radiation and has a small dielectric constant. Though long recognized, most of these superior properties of diamond have remained largely unexploited because diamond did not exist in a form suitable for many high-tech applications. Now chemical vapor deposition (CVD) makes diamond, and its high-performance properties, available in thin sheets or coatings, which can cover large areas in a variety of unique shapes. In this form, diamond is also the ultimate in protective coatings. The coming of age of the diamond CVD process may, therefore, prove to be the most important development in industrial technology since the semiconductor. Synthetic Diamond explores the quantum leap in technological capability and industrial and commercial potential made possible by CVD. Beginning with a vision of a 21st century revolutionized by products made with CVD diamond, the text goes on to trace the origins and emergence of the process and to review the current scientific and technological status of the new CVD techniques. There is also a survey of the synthesis, structure, properties, and applications of diamond-like carbon. A fundamental description and extended review of the properties and characterization of diamond is followed by an in-depth look at current and potential applications for synthetic diamond, as well as a comparative economic assessment of the CVDprocess and the traditional high-pressure high-temperature (HPHT) process. The book concludes with another vision of the future, this time a look at potential CVD diamond markets of the 21st century. The first comprehensive book devoted to CVD diamond, Synthetic Diamond will be of immense interest to professionals and students in materials science, solid state physics, inorganic and physical chemistry, electrochemistry, electronics, and optics. It offers electrical, mechanical, and materials engineers, as well as new product developers a tantalizing first glance at a major new development that even now, sparkles on the industrial horizon.
  

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it was a riveting look at the science, technology and people involved in overcoming early impracticality of the fledgling chemical vapor deposition synthesis method and its development in today's state of commercial readiness. Provides insights into numerous vapor phase techniques. Surveys the synthesis, structure, properties and applications of diamond like carbon. Details current and rapidly emerging applications, manufacturing and markets. 

Contents

The Vision of Diamond as an Engineered Material
3
Development of LowPressure Diamond Growth in the United
21
Summary of Research on Diamond Growth from the Gas Phase
41
Development of Diamond Science and Technology in Japan
57
Development and Status of Diamondlike Carbon
91
Growth of Diamond by CVD Methods and Effects of Process
145
Vapor Phase Diagnostics in Diamond CVD
193
Mechanisms for CVD Diamond Growth
243
Diamond Electrical Properties and Electronic Device Behavior
355
Optical Properties and Optoelectronic Applications of Diamond
401
Tribology and Wear Behavior of Diamond
419
Industrial Applications of SingleCrystal Diamond
507
Technological Applications of CVD Diamond
533
A Comparative Assessment of CVD Diamond Manufacturing
581
CVD Diamond Markets in the 21st Century
625
Index
649

Physical Chemical and Microstructural Characterization
307

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