Sensors Update, Volume 6Henry Baltes, W. Göpel, J. Hesse VCH, 2000 - Detectors |
Contents
Light Adressable Potentiometric Chemical Sensing System 3 | 20 |
3 | 22 |
4 | 30 |
Copyright | |
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accelerometer amperometric Appl applications beam cantilever capacitance Chem chemical chip circuit coherence function concentration deposited detection developed device diaphragm displacement drive electrical Electrochem electrode electrostatic actuator Equation Esashi etching fabrication process ferroelectric Fiber-optic frequency modulation gas sensors glass gyro gyroscope heterolayer sensor Hotate I-FOG IEEE integrated Japan laser diode Lett Lightwave liquid lithography lock-in amplifier measured mechanical method Micro microactuator microfabrication microgyroscope micromachine technology Miura mode Optical Fiber optical switches output oxide oxygen sensor pattern PbTiO3 phase modulation photoresist Phys piezoelectric piezoresistors piggyback actuator PM fiber polarization potential probe Proc pyroelectric resonant frequency response rotation sample scanning Schematic SECM semiconductor Sens sensitivity Sensor Symp SH-SAW sensor shown in Figure shows signal silicon slider SnO2 stiction structure substrate surface Tech technique Technol temperature thermal thickness thin film tion vibration voltage wafer waveguide Yamazoe µTAS