MEMS: Applications (Google eBook)
CRC Press, Nov 29, 2005 - Technology & Engineering - 568 pages
As our knowledge of microelectromechanical systems (MEMS) continues to grow, so does The MEMS Handbook. The field has changed so much that this Second Edition is now available in three volumes. Individually, each volume provides focused, authoritative treatment of specific areas of interest. Together, they comprise the most comprehensive collection of MEMS knowledge available, packaged in an attractive slipcase and offered at a substantial savings. This best-selling handbook is now more convenient than ever, and its coverage is unparalleled.
The third volume, MEMS: Applications, offers a broad overview of current, emerging, and possible future MEMS applications. It surveys inertial sensors, micromachined pressure sensors, surface micromachined devices, microscale vacuum pumps, reactive control for skin-friction reduction, and microchannel heat sinks, among many others. Two new chapters discuss microactuators and nonlinear electrokinetic devices. This book is vital to understanding the current and possible capabilities of MEMS technologies.
MEMS: Applications comprises contributions from the foremost experts in their respective specialties from around the world. Acclaimed author and expert Mohamed Gad-el-Hak has again raised the bar to set a new standard for excellence and authority in the fledgling fields of MEMS and nanotechnology.
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Nonlinear Electrokinetic Devices
accelerometer Actuators Transducers applications array beam boundary layer bubble bulk micromachining capacitive capillary channel circuit coefficient components Conference on Solid-State convection damping deflection developed devices diaphragm droplet dynamic effect electric electrode electrokinetic electrostatic energy Equation etching experimental fabrication field flow control fluid force Freescale Semiconductor frequency Gad-el-Hak heat transfer hot-wire IEEE inertial sensors integrated linear liquid martensite material measurements MEMS sensors MEMS-based micro heat pipes microactuators microchannel Microelectromechanical Systems microrobots microscale motion near-wall operation output packaging Peterson piezoelectric piezoresistive polyimide polysilicon pressure sensors Proc pumps ratio reactive reduce Reprinted with permission resonant Reynolds number robot rotation scale sensitivity Sensors and Actuators shear layer shear stress shown in Figure silicon Solid-State Sensors spanwise squeeze film stiction streamwise structures substrate surface micromachined Technical Digest techniques temperature thermal thickness Transducers turbulent flows vacuum vapor velocity viscous voltage vortices wafer wall wall-shear stress
Page vii - Engineers, an Associate Fellow of the American Institute of Aeronautics and Astronautics and a member of the Board of Trustees of the Theodore von Karman Memorial Foundation.
Page v - Hekinah degul: the others repeated the same words several times, but then I knew not what they meant. "I lay all this while, as the reader may believe, in great uneasiness: at length, struggling to get loose, I had the fortune to break the strings, and wrench out the pegs that fastened my left arm to the ground; for, by lifting it up to my face, I discovered the methods they had taken to bind me, and at the same time with a violent pull, which...
Page v - These people are most excellent mathematicians, and arrived to a great perfection in mechanics, by the countenance and encouragement of the emperor, who is a renowned patron of learning.
Page ii - Nonlinear Analysis of Structures M. Sathyamoorthy Practical Inverse Analysis in Engineering David M. Trujillo & Henry R. Busby Pressure Vessels: Design and Practice Somnath Chattopadhyay Principles of Solid Mechanics Rowland Richards, Jr. Thermodynamics for Engineers Kau-Fui Wong Vibration and Shock Handbook Clarence W. de Silva Viscoelastic Solids The MEMS Handbook Second Edition Applications Edited by Mohamed GacUel-Hak Taylor &.
Page v - I could only look upwards, the sun began to grow hot, and the light offended my eyes. I heard a confused noise about me, but, in the posture I lay, could see nothing except the sky. In a little time I felt something alive moving on my left leg, which advancing gently forward, over my breast, came almost up to my chin ; when bending my eyes downward as much as I could, I perceived it to be a human creature not six inches high, with a bow and arrow in his hands, and a quiver at hit back.