Introduction to microlithography

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American Chemical Society, 1994 - Science - 527 pages
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Updated and expanded! Reviews the theory, materials, and processes that are used in the lithographic process. Opens with a brief historical introduction to the advances in microlithography. Discusses four major topics: the physics of the lithographic process, organic resist materials, resist processing, and plasma etching. Designed as a tutorial for researchers with no experience in the field, as well as those experienced in microlithography. Will also prove invaluable to those already involved in microlithography. Includes numerous references for more detailed reading on specific aspects of microlithography.

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Contents

The Physics
19
Organic Resist Materials
139
Resist Processing
269
Copyright

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Introduction to microlithography (2nd edition). Edited by lf ...
Introduction to microlithography (2nd Edition). Edited by L. F. Thompson, cg Willson and mj Bowden. American Chemical Society, Washington, dc, 1994. ...
doi.wiley.com/ 10.1002/ pi.1995.210370312

SEMICON West
Introduction to Microlithography: Theory, Resolution Enhancement and Future Trends ... Note: Course includes the text, Introduction to Microlithography, ...
www.semiconwest.org/ ProgramsandEvents/ ShortCoursesandWorkshops/ CTR_015063

Course Detail: Courses from SPIE: SPIE.org
Introduction to Microlithography: Theory, Materials, and Processing (SC101). Course Level: Introductory Instructor: Murrae J. Bowden, EMP Consulting; ...
www.spie.org/ x1145.xml?course_id=92& origin_id=x1146& pf=true& topic_id=11

Untitled Document
lf Thompson, "An Introduction to Lithography," Introduction to Microlithography, Second Edition, Ed. lf Thompson, cg Willson, and mj Bowden, Washington, ...
dot.che.gatech.edu/ henderson/ Introductions/ microlithography%20intro.htm

Method for producing semiconductor devices - US Patent 6265119
Thompson et al., "Introduction to Microlithography" ACS symposium pp. 4-7, 1983. ... "Introduction to Microlithography" (.COPYRGT. 1983) pp. 16-23. ...
www.patentstorm.us/ patents/ 6265119.html

OP-L: Photolithography filename: LITHO The fabrication of planar ...
Introduction to Microlithography, eds. lf Thompson, cg Willson, mj Bowden,. American Chemical Society, 1983, ISBN 0-8412-0775-5. ...
weewave.mer.utexas.edu/ DPN_files/ courses/ FabLab/ Fab_Lab_Manual/ lab_man_2003/ OPL_LITHO_03.pdf

NANONET - THE METROPOLIS OF NANO INFORMATION
Sun, SC101 - Introduction to Microlithography: Theory, Materials, and Processing (Bowden, Thompson, Willson) 8:30 am to 5:30 pm, $440 / $520 ...
nano.kisti.re.kr/ nanonet/ wsp/ english/ event/ eventView.jsp?seqno=27908

Phys. Rev. E 65, 031206 (2002): Cheng and Giordano - Fluid flow ...
Introduction to Microlithography, 2nd ed., edited by lf Thompson, cg Wilson, and mj Bowden (American Chemical Society, Washington, DC, 1994). ...
link.aps.org/ doi/ 10.1103/ PhysRevE.65.031206

Process for making an imaged oxygen-reactive ion etch barrier ...
"Multi-Layer Resist Systems", bj Lin, Chapter in Introduction to Microlithography, Thompson, Willson & Bowden, Editors, American Chemical Society, (1982). ...
www.freepatentsonline.com/ 4464460.html

Part III. Functional Polymers for Semiconductor Applications ...
Thompson, lf; Willson, cg; Bowden, mj Introduction to Microlithography; 2nd Ed;. ACS Professional Reference Book; American Chemical Society; Washington, DC, ...
www.cheric.org/ ippage/ e/ ipdata/ 2006/ 01/ file/ e200601-701.pdf