The Effects of Contamination and Local Electric Fields on Voltage Contrast in the Scanning Electron Microscope |
Contents
The Scanning Electron Microscope | 2 |
Theory of High Resolution Voltage Contrast | 6 |
Behavior of an Ideal Retarding Field Spectrometer | 10 |
9 other sections not shown
Common terms and phrases
100.0 Reading number 5V square wave amplitude analyzer grid average vertical kinetic changes collection of secondary decrease deflection detector diffusion pump electric fields electron distribution curve emission coefficient estimate expected value extraction field extraction grid false voltage field effects filter voltage grid voltage high resolution voltage hydrocarbon initial energy input voltage integrated circuit line spacing line widths mean square error metal lines micrograph micron micron line multimeter negative neighboring features number of secondary photomultiplier plotted PM Output PM vs Vf pole piece primary electron beam range of linear Reading number Fig reduced Output resolution voltage contrast retarding field spectrometer RMSD root mean square scanning electron microscope scintillator secondary electron current secondary electron distribution secondary electron emission shown in Fig signal silicon dioxide slope specimen potential specimen voltage trap grid vertical kinetic energy Vf curve voltage measurements voltage resolution Volts Vsp Widths and spacings