The Materials Science of Thin Films

Front Cover
Academic Press, 1992 - Science - 704 pages
2 Reviews
This is the first available textbook to provide comprehensive coverage of the science and technology of thin films and coatings. Developed for upper-level undergraduate and beginning graduate students, the book discusses physical and chemical vapor deposition processes; phenomena involving nucleation and growth, stress, diffusion and reaction; structural and chemical characterization techniques; and applications involving coatings, magnetic and optical recording materials, integrated optics, and quantum devices. The book includes chapters on epitaxy and surface modification in addition to discussing emerging technologies such as diamond films and high Tc superconductors. Complete problem sets are provided at the end of each chapter to facilitate self-study.

Key Features
* The first true textbook to provide broad coverage of thin films from processing to performance
* Covers film materials used in microelectronics, magnetic applications, optics, and metallurgical and protective coatings
* Includes chapters on epitaxy, surface modification using laser and ion beams, and emerging thin film materials and applications
* Extensive treatment is given to chemical vapor deposition, diffusion and reactions, and stress in films
* Provides complete exercise sets to facilitate study
  

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Contents

Chapter 2
49
Chapter 3
79
Chapter 6
80
Chapter 4
147
Chapter 5
195
Characterization of Thin Films
249
Chapter 7
307
Chapter 8
355
Chapter 9
403
Chapter 10
451
Chapter 11
507
Chapter 12
547
Chapter 13
589
Chapter 14
629
Appendix 1
685
Copyright

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PII: 0042-207X(95)80054-9
The Materials Science of Thin Films. Milton Ohring. Academic Press Inc. 1992. ISBN 0-12-524-990-X,. 704 pp. Price f48.00. ...
linkinghub.elsevier.com/ retrieve/ pii/ 0042207X95800549

THE MATERIALS SCIENCE OF SURFACES AND INTERFACES
... of the Solid-Water Interface” Werner Stumm; “Colloids and Interfaces in Life Sciences” William Norde; “The Materials Science of Thin Films” 2nd edn. ...
cgep.virginia.gov/ Syllabi/ CWM_Mat-Sci-Surf-Int_syllabus_F08.doc

Nov06_library b.qxd
LIBRARY. 942. MRS BULLETIN • VOLUME 31 • NOVEMBER 2006. Materials Science in. Microelectronics I: The. Relationships Between Thin Film ...
www.mrs.org/ s_mrs/ bin.asp?CID=7950& DID=191244& DOC=FILE.PDF

Barnes & Noble.com - Books: The Materials Science of Thin Films ...
The Materials Science of Thin Films, Ohring, Milton Ohring, Hardcover, REV, 2, Book, ISBN: 0125249756, Science, Engineering, Barnes & Noble.com.
search.barnesandnoble.com/ The-Materials-Science-of-Thin-Films/ Milton-Ohring/ e/ 9780125249751

Phys. Rev. B 63, 012102 (2001): Wojcik et al. - Formation of a Co ...
M. Ohring, The Materials Science of Thin Films (Academic Press, San Diego, 1992), Sec. 5.7.2, and references therein. M. Kitada, J. Magn. Magn. Mater. ...
link.aps.org/ doi/ 10.1103/ PhysRevB.63.012102

Multilayer attenuating phase-shift masks - US Patent 6274280
The application of multilayered stacks as dielectric mirrors is disclosed in "The Materials Science of Thin Films", M. Ohring, Academic Press, ...
www.patentstorm.us/ patents/ 6274280-description.html

Thermal stability of Al-1%Si-0.5%Cu/tisi <Subscript>2 </Subscript ...
MILTON OHRING, 'The materials science of thin films". (Academic Press, San Diego, 1992) Ch. 8, p. 393. 6. sp MURARKA, "Silieide for VLSI applications" ...
www.springerlink.com/ index/ WU43721Q8136V517.pdf

(WO/2005/031034) ORGANOTITANIUIM PRECURSORS, METHOD FOR THEIR ...
... Ti (C, N) + 8HC1 + H2 M. Ohring, The Materials Science of Thin Films, Academic Press Inc. Harcourd Brace Jovanovich, Publishers, 1992; A. Kopf, ...
www.wipo.int/ pctdb/ en/ wo.jsp?IA=WO2005031034& wo=2005031034& DISPLAY=DESC

PES 105 Course Information
Text: "The Materials Science of Thin Films". M. Ohring, 1992. We will cover parts of Chapters 1 -11 in the text - but not in order. ...
www.uccs.edu/ ~tchriste/ courses/ PHYS549/ 549Info.html

Materials for Micro- and Nano-Systems
cv Thompson, Thinly Spread (Review of The Materials Science of Thin Films by Milton Ohring), Nature 357, p. 292, 1992. J67. cv Thompson, The Yield Stress of ...
scripts.mit.edu/ ~cthomp/ publications/ articles/ 1990-1999/

About the author (1992)

Ohring has been professor of Materials Science and engineering at Stevens Institute of Technology for more than 30 years.

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