MOEMS 99: Proceedings : 3rd International Conference on Micro Opto Electro Mechanical Systems, Optical MEMS : August 31 - September 1, 1999, Mainz Hilton, Mainz, Germany

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IMM, 1999 - Microelectromechanical systems - 273 pages
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Contents

Talk
11
Talk
15
Talk 6
27
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