The MEMS Handbook (Google eBook)

Front Cover
Mohamed Gad-el-Hak
CRC Press, Sep 27, 2001 - Technology & Engineering - 1368 pages
3 Reviews
The revolution is well underway. Our understanding and utilization of microelectromechanical systems (MEMS) are growing at an explosive rate with a worldwide market approaching billions of dollars. In time, microdevices will fill the niches of our lives as pervasively as electronics do right now. But if these miniature devices are to fulfill their mammoth potential, today's engineers need a thorough grounding in the underlying physics, modeling techniques, fabrication methods, and materials of MEMS.

The MEMS Handbook delivers all of this and more. Its team of authors-unsurpassed in their experience and standing in the scientific community- explore various aspects of MEMS: their design, fabrication, and applications as well as the physical modeling of their operations. Designed for maximum readability without compromising rigor, it provides a current and essential overview of this fledgling discipline.
  

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This book is large and in charge. There may be some gold in this book. However, as of right now, nothing jumps out at me as being different than the other books.

Contents

Properties Initial Design Values
3-1
Flow Physics Mohamed GadelHak
4-1
Coupling Flow
5-1
Background Summary and Conclusions
6-1
Burnett Simulations of Flows in Microdevices Ramesh K Agarwal
7-1
Lubrication CouetteFlow Damping SqueezeFilm Damping Lubrication
9-1
Physics of Thin Liquid Films Alexander Own 101
10-1
BubbleDrop Transport in Microchannels HsuehChia Chang 111
11-1
Fabrication and Characterization of SingleCrystal Silicon Carbide MEMS
20-31
Microfabricated Chemical Sensors for Aerospace Applications
22-1
Chester Wilson and Yogesh B Gianchandani 251
23-25
Sensors and Actuators for Turbulent Flows Lennart Lofdahl and Mohamed GadelHak 261
26-1
SurfaceMicromachined Mechanisms Andrew D Oliver and David W Plummer 271
27-1
Packaging of HarshEnvironment MEMS Devices LiangYu Chen
27-23
Microrobotics Thorbjorn Ebefors and Goran Stemtne 281
28-28
Microscale Vacuum Pumps E Phillip Muntz and Stephen E Vargo 291
28-29

Fundamentals of Control Theory Bill Goodwine 121
12-1
ModelBased Flow Control for Distributed Architectures Thomas R Bewley 131
13-1
ModelBased Flow Control for Distributed
13-13
Soft Computing in Control Mihir
14-1
and KeonYoung Yun
14-7
n Design and Fabrication
14-36
Materials for Microelectro mechanical Systems Christian A Zorman
16-15
MEMS Fabrication Marc J Madou 161
16
Inertial Sensors Paul L Bergstrom and Gary G Li 241
25
Electrochemical Fabrication EFAB Adam L Cohen 191
19-1
MolecularBased Microfluidic Simulation Models Ali Beskok
19-8
Microdroplet Generators FanGang Tseng 301
28-30
Soft Computing in Control Mihir Sen Bill Goodwine 141
14
Micro Heat Pipes and Micro Heat Spreaders G P Bud Peterson 311
31
MicroChannel Heat Sinks Yitshak Zohar 321
32-1
Flow Control Mohamed GadelHak 331
33-1
The Future
33-41
Reactive Control for SkinFriction Reduction Haecheon Choi 341
34-1
Towards MEMS Autonomous Control of FreeShear Flows Ahmed Naguib 351
35-37
Fabrication Technologies for Nanoelectromechanical Systems Gary H Bernstein Holly V Goodson and Gregory L Snider 361
36-19
Index
1-1
Copyright

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Page 3-25 - The US Government is authorized to reproduce and distribute reprints for Governmental purposes notwithstanding any copyright annotation thereon.
Page v - Hekinah degul : the others repeated the same words several times ; but I then knew not what they meant. I lay all this while, as the reader may believe, in great uneasiness. At length, struggling to get loose, I had the fortune to break the strings, and wrench out the pegs that fastened my left arm to the ground ; for by lifting it up to my face, I discovered the methods they had taken to bind me, and, at the same time, with a violent pull, which gave me excessive pain, I a little loosened the strings...
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Page v - These people are most excellent mathematicians, and arrived to a great perfection in mechanics by the countenance and encouragement of the emperor, who is a renowned patron of learning.
Page 3-27 - Gupta, RK, Osterberg, PM, and Senturia, SD (1996) "Material Property Measurements of Micromechanical Polysilicon Beams," Proc. SPIE 2880, pp. 39-45. Hoffman, RW (1989) "Nanomechanics of Thin Films: Emphasis, Tensile Properties...
Page 3-29 - This work was supported in part by the US Army (Signal Corps), the US Air Force (Office of Scientific Research, Air Research and Development Command), and the US Navy (Office of Naval Research); and in part by the National Science Foundation.

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