books.google.com - More than 1,100 TEM images illustrate the science of ULSIThe natural outgrowth of VLSI (Very Large Scale Integration), Ultra Large Scale Integration (ULSI) refers to semiconductor chips with more than 10 million devices per chip. Written by three renowned pioneers in their field, ULSI Semiconductor Technology...http://books.google.com/books/about/ULSI_Semiconductor_Technology_Atlas.html?id=hpJ2KbrI2DMC&utm_source=gb-gplus-shareULSI Semiconductor Technology Atlas
