Plasma Science and Technology: Progress in Physical States and Chemical ReactionsTetsu Mieno In the early twentieth century, Dr. Irving Langmuir actively studied plasma discharge and surface science. Since then, great progress has been made in the development of applications of discharges and plasmas such as discharge lamps, electric tubes, and arc welding. In relation to studies on space physics and controlled nuclear fusion, plasma physics has greatly advanced. Plasma chemistry has also progressed along with its applications in LSI fabrication technology, the chemical vapor deposition of functional films, and the production of nanomaterials. In the twenty-first century, the further development of applications of plasma physics and plasma chemistry is certainly expected. In this book, 18 chapters on the recent progress in plasma science and technology have been written by active specialists worldwide. |
Contents
Cold Plasma Produced Catalytic Materials | 25 |
Plasma Nitriding of Titanium Alloys | 67 |
Lowtemperature Thermochemical Treatments of Stainless | 107 |
Computational Studies of the Impulse Plasma | 131 |
Physicochemical Analysis of Argon PlasmaTreated Cell | 155 |
Nonthermal Plasma Technology for the Improvement | 173 |
PlasmaEnhanced Vapor Deposition Process for | 213 |
LaserProduced Heavy Ion Plasmas as Efficient Soft XRay | 241 |
Diagnostics of Magnetron Sputtering Discharges by Resonant | 295 |
A Technique for TimeResolved Imaging of Millimeter Waves | 329 |
Optically Thick LaserInduced Plasmas in Spectroscopic | 363 |
Industrial Applications of LaserInduced Breakdown | 401 |
Electrical Discharge in Water Treatment Technology | 429 |
Study of CO2 Decomposition in Microwave Discharges | 479 |
Stochastic and Nonlinear Dynamics in LowTemperature | 507 |
LaserInduced Plasma and its Applications | 259 |
Common terms and phrases
absorption Acta analysis applications argon atoms austenitic bubble carbon carburizing catalyst cathode cells chemical chemical vapor deposition Coatings Technology coefficient compound layer corona corona discharge Cs-Xe decomposition dielectric barrier dielectric barrier discharge diffusion discharge reactors effect electron temperature emission energy efficiency enhanced equation fabrication formation glow discharge gyrotron hydrogen imaging increase ionization ions Journal laser ablation laser-induced breakdown spectroscopy laser-induced plasma LIBS low-temperature magnetron martensitic material measurements metal method microstructure microwave MMW beam MMW intensity nitrogen non-thermal plasma optical oxidation oxygen parameters particles PECVD Phys Physics plasma nitriding plasma polymerization Plasma Process plasma treatment plasma-treated polymer pressure properties radiation samples scaffolds self-absorption shown in Figure species spectral line sputtering stainless steel structure substrate Surface and Coatings target thermal thermochemical treatments thin films tissue engineering titanium alloys tube vapor deposition VCR intensity VCRD technique voltage wavelength