Microelectronic Structures and MEMS for Optical Processing, Volume 3513

Front Cover
SPIE--The International Society for Optical Engineering, 1998 - Microelectronics
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Contents

Finding markets for microstructures 3513202
17
Micromachining technologies for miniaturized communication devices 3513203
24
Novel beamsteering micromirror device 351302
40
Copyright

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