MEMS Components and Applications for Industry, Automobiles, Aerospace, and Communication II: 28-29 January 2003, San Jose, California, USA

Siegfried W. Janson, Society of Photo-optical Instrumentation Engineers

SPIE, 2003 - Computers - 248 pages

Bibliographic information

• Title: MEMS Components and Applications for Industry, Automobiles, Aerospace, and Communication II: 28-29 January 2003, San Jose, California, USA; Volume 4981 of Proceedings of SPIE Series; Volume 4981 of Proceedings of SPIE--the International Society for Optical Engineering; Volume 4981 of Proceedings of the Society of Photo-Optical Instrumentation Engineers; Volume 4981 of SPIE proceedings series, ISSN 0277-786X
• Editors: Siegfried W. Janson, Society of Photo-optical Instrumentation Engineers
• Contributors: Semiconductor Equipment and Materials International, Solid State Technology (Organization), Sandia National Laboratories
• Edition: illustrated
• Publisher: SPIE, 2003
• ISBN: 0819447811, 9780819447814
• Length: 248 pages
• Subjects: Computers / Hardware / Chips & Processors; Technology & Engineering / Electronics / General; Technology & Engineering / Manufacturing; Technology & Engineering / Mechanical; Technology & Engineering / Nanotechnology & MEMS