EMC 2004: Lectures Held at the GMM-Conference, January 12 - 14, 2004 in Dresden, Germany |
From inside the book
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... resist coated features on the new Leica Microsystems ' W. Steinberg , Leica Microsystems Wetzlar GmbH , Wetzlar , Germany 35 Semi - Transparent isolated defects detection by die to database mask inspection using virtual scanning ...
... resist coated features on the new Leica Microsystems ' W. Steinberg , Leica Microsystems Wetzlar GmbH , Wetzlar , Germany 35 Semi - Transparent isolated defects detection by die to database mask inspection using virtual scanning ...
Contents
157nm | 10 |
Aerial image measurement technique for todays and future 193nm lithography | 29 |
SemiTransparent isolated defects detection by die to database mask inspection | 43 |
Determining the transfer function of a mask fabrication process | 57 |
OASIS progress on implementing the new stream format for containing data | 73 |
Common terms and phrases
aerial image algorithm alignment applied chamber chip chromium chuck clamping pressure compressed contact angle contact holes contour corner rounding Cr etch defocus developed deviation Dresden e-beam edge effect etch bias etch rate EUV mask EUVL exposure tool Extreme Ultraviolet Lithography feature field Figure flatness function GDSII Germany illumination image displacement immersion lithography imprint Infineon Technologies intensity layout LEEPL Leica Leica Microsystems lens lithography manufacturing mask blank mask defects mask processing Mask Technology maximum measurement MEEF metrology microns multilayer node numerical aperture OASIS optical optical proximity correction optimization overlay performance parameters pattern data pellicle induced pellicle shape Phase Shift Masks photomask pixels plot polymer position process window production quartz repair resist resolution reticle scanning SEMI serifs shows simulation SPIE standard stepper structure sub-system substrate surface system corrections target techniques temperature template thickness threshold tilt wafer wavelength Zerodur