Specialty Gas Analysis: A Practical Guidebook

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Jeremiah D. Hogan
Wiley, Dec 27, 1996 - Science - 200 pages
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The semiconductor industry is moving toward gas-phase reagents, increasing the relative importance of gas purity. Anyone who deals in the manufacturing of these devices needs to understand the technology available for modern gas analysis. Most specialty gas vendors have some re in place for quality assurance, but these usually are very simplistic and outdated methods. No book was available that gave guidance on providing accurate, reproducible data on specialty gas products. This is the first book that provides an introduction to current analytical methods and equipment for the analysis of high- purity gases used in the semiconductor industry and related fields.

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Contents

Humidity Measurement in Gases for Semiconductor
21
The Chromatographic Analysis of Trace
43
Ultrapure Sampling of CorrosiveGas Cylinders
81
Copyright

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About the author (1996)

ASHUTOSH MISRA is Director of Applications and New Product Development for Air Liquide Electronics, Inc.
JEREMIAH D. HOGAN is Director of Physical Analysis Laboratories for Texas Instruments, Inc.
RUSSELL A. CHORUSH is an associate at the law firm of Conley, Rose and Tayon, PC

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