Polycrystalline Thin Films: Structure, Texture, Properties, and Applications : Symposium Held April 4-8, 1994, San Francisco, California, U.S.A.Katayun Barmak |
Contents
GRAIN GROWTH IN POLYCRYSTALLINE THIN FILMS | 3 |
TOWARD REALIZING THE STRUCTUREPROPERTY LINK | 13 |
ORIENTATION IMAGING OF THE MICROSTRUCTURE | 23 |
Copyright | |
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Common terms and phrases
alloy films amorphous phase angle anisotropy annealing Appl as-deposited atomic average bilayer calculated CeO2 chemical chemical potential coatings CoCrPt coercivity composition concentration Cr underlayer crystalline crystallites crystallographic curve decrease density dependence determined diffraction patterns dopant effect elastic epitaxial experimental ferroelectric Figure film thickness films deposited films grown formation free energy function grain boundary grain boundary diffusion grain growth grain size hysteresis IEEE increase indicate interface interlayer intermetallic kinetics laser lattice layer Magn magnetic properties material measured micrographs microstructure mTorr multilayers nucleation observed obtained orientation oxide oxygen parameters particles peak permalloy perovskite Phys plane poly-Si pressure Proc Raman ratio reaction sample scan sheet resistance shown in Fig shows silicon simulation single crystal SiO2 spectra sputter deposited sputtered stress structure substrate substrate temperature technique texture thermal thin films transmission electron microscopy X-ray diffraction