Electron beam interactions with solids for microscopy, microanalysis & microlithography: proceedings of the 1st Pfefferkorn Conference, held April 18 to 23, 1982, at the Asilomar Conference Center, Monterey, CA

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Scanning Electron Microscopy, 1984 - Science - 372 pages
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Contents

CROSS SECTIONS FOR INELASTIC SCATTERING OF ELECTRONS BY ATOMS SELECTED TOPICS
1
INELASTIC SCATTERING OF ELECTRONS IN SOLIDS
17
SECONDARY ELECTRON EMISSION
33
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