Quantitative Electron Microprobe AnalysisThe Electron "licroprobe X-!{ay Analyscr conceivcd b ' R C.\S'L\I: \G and A. Cl'!: '\ lEI( in 1949 has been developcd as an extremelv po\\'crful tool in spcctrochcmical analysis for a wide range of applications, ranging from qualitative elcmcntary distribution studies, to highly localiscd quantitatin analysis on a one micron scale. \\'ith the increasing number oi' versatile instruments, commcrcially available, the domain of applications - in metallurgy, solid state physics, mineralogy and geology, biology and medicine, arts and archeology - is rapidly expanding, particularly because reliable quantitative analyses can be achieved. It is well established that in multicomponent specimens, the relative x-ray intensity generated by the electron bombardment - i.e. the intensity ratio of the characteristic x-ray radiation emitted under identical experimental conditions by the specimen and a calibration standard - is not directly correlated to the elementary mass concentration. The use of a wide scale of carefully prepared homogeneous calibration standards is generally very tedious and restricted to binar)' systems. For more complex specimens, the conversion of recorded x-ra)' intensity ratios to elementary mass concentration requires, besides carefule selection of experimental conditions, an adequate correction calculation to take account oi' the various physical phenomenas occurring in the tarp;et - electron retardation, electron backseattering, x-ray excitation efficieney, fluorescence enhaneement by eharaeteristic and continuous radiation and x-ray mass absorption. |
Contents
3 Procedures for Correction Calculation | 9 |
4 Detection Limit Detection Threshold and Microprobe Trace Analysis | 20 |
A Characteristic Wavelength and Excitation Potentials for K L M Series | 28 |
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0.4 X SIGMA 13 SIGMA 20 SIGMA absorption coefficients absorption correction alloy angle anticathode approximation ARCHARD atomic number effect atomic weight background counts calculation calibration standards CASTAING characteristic radiation computed cosec depth detection limit determination distribution DUNCUMB effective current factor effective LENARD coefficients electron acceleration electron acceleration voltage electron beam electron bombardment Electron Microprobe Analysis electron penetration Electron Probe Microanalysis electron stopping power emitted energies higher Euratom experimental conditions filament fluorescence enhancement H V-Vc incident electron interval ionic bonding ionisation k₁ kilovolts KIRIANENKO LAPLACE transform Line Wavelength Excitation localisation mass absorption coefficients mean atomic number method multiple scattering number of measurements obtain occurs nearer PHILIBERT primary x-ray intensities pure element quantitative Secondary fluorescence SIGMA H 3.4 spectrometer spherical aberration take account Theisen theoretical tion University of Paris V-V₂ Wavelength Excitation kev WITTRY x-ray excitation efficiency x-ray mass absorption x-ray radiation απ ΙΑ ᏞᏰ