MEMS and Nanotechnology, Volume 2: Proceedings of the 2010 Annual Conference on Experimental and Applied Mechanics

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Tom Proulx
Springer Science & Business Media, Mar 24, 2011 - Technology & Engineering - 282 pages

This the second volume of six from the Annual Conference of the Society for Experimental Mechanics, 2010, brings together 40 chapters on Microelectromechanical Systems and Nanotechnology. It presents early findings from experimental and computational investigations on MEMS and Nanotechnology including contributions on Nanomechanical Standards, Magneto-mechanical MEMS Sensors, Piezoelectric MEMS for Energy Harvesting, and Linear and Nonlinear Mass Sensing.

 

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Contents

Nanomechanical standards based on the intrinsic mechanics of molecules and atoms
2
MagnetoMechanical MEMS Sensors for BioDetection
9
Recent Progress of Piezoelectric MEMS for Energy Harvesting Devices
16
Performance of Piezoelectric Power Generator in Environmental Conditions
25
Comparison of Transduction Efficiency for Energy Harvester between Piezoelectric Modes
33
Size Effects Associated with Microcompression Experiments on SingleCrystal Magnesium
41
Mechanically probing timedependent mechanics in metallic MEMS
43
Small mass measurements for tuning forkbased atomic force microscope cantilever spring constant calibration
49
Investigation of the Youngs Modulus of Fibers in an Electrospun PCL Scaffold Using AFM and its Correlation to cell Attachment
157
Recent Progress in EBeam Lithography for SEM Patterning
163
Analysis of Scatteringtype Scanning Nearfield Optical Microscopy for Residualstrain Measurements
167
Experimental Methods for Tensile Testing of Metallic Thin Films at High Temperatures
173
Surface Texturing Using Gold Nanoparticles to Reduce Adhesion in MEMS
181
Design of Microswitch Systems Avoiding Stiction due to Surface Contact
189
Measurement of adhesive force between two mica surfaces with multiple beam interferometry
197
Performance Studies of A Prototypical MEMS Thermal Actuator
203

Linear and Nonlinear Mass Sensing Using PiezoelectricallyActuated Microcantilevers
57
Calibrating Force and Displacement in the Face of Property Variation
67
Standardization of Nanoscale Interfacial Experiments Using MEMS
75
A Combined ExperimentalComputational Investigation
81
ElectroMechanical Response of Carbon Nanotube Reinforced Polymer Composites
83
A Test Platform for Systematic Investigation of Tribology in MEMS
85
Full Optical Scatter Analysis for Novel Photonic and Infrared Metamaterials
97
Thermal Management and Metamaterials
107
MEMS integrated metamaterial structure having variable resonance for RF applications
115
Characterization and Testing of Adaptive RF Metamaterial Structure Using MEMS
121
Design of a microfluidic pump based on conducting polymers
129
Micromotor Fabrication by Surface Micromachining Technique
139
Improvement of Piezoresistive Microcantilever Beams for Gas Detection and Sensing
147
A New Electrothermal Microactuator with Zshaped Beams
209
Electrothermal Actuators for Integrated MEMS Safe and Arming Devices
215
Contrast Reversal on Surface Plasmon Resonance Reflectivity in Nickel and Nickel Alloy Films
223
Effect of Accelerated Ultra Violet and Thermal Exposure on Nano Scale Mechanical Properties of Nylon Fibers
229
High Thermal Conductivity PolyurethaneBoron Nitride Nanocomposite Encapsulants
237
Advanced hard mask approach of ICs copper interconnects processes integration
243
Advances in Thin Film Nanoindentation
253
Mechanical and Piezoelectric Behavior of Thin Film PZT Composites for MEMS Applications
261
FRACTURE BETWEEN SELFASSEMBLED MONOLAYERS
267
Control and Quantification of Residual Stresses in Anodically Bonded MEMS Structures
269
Submicron Scale Mechanical Properties of Polypropylene Fibers Exposed to Ultraviolet and Thermal Degradation
274
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About the author (2011)

Dr. Tom Proulx is the Executive Director of the Society for

Experimental Mechanics, Inc.

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