3D Laser Microfabrication: Principles and Applications

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Hiroaki Misawa, Saulius Juodkazis
John Wiley & Sons, Aug 21, 2006 - Technology & Engineering - 403 pages
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A thorough introduction to 3D laser microfabrication technology, leading readers from the fundamentals and theory to its various potent applications, such as the generation of tiny objects or three-dimensional structures within the bulk of transparent materials.
The book also presents new theoretical material on dielectric breakdown, allowing a better understanding of the differences between optical damage on surfaces and inside the bulk, as well as a look into the future.
Chemists, physicists, materials scientists and engineers will find this a valuable source of interdisciplinary knowledge in the field of laser optics and nanotechnology.
 

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Contents

1 Introduction
1
2 LaserMatter Interaction Confined Inside the Bulk of a Transparent Solid
5
3 Spherical Aberration and its Compensation for High Numerical Aperture Objectives
37
4 The Measurement of Ultrashort Light Pulses in Microfabrication Applications
57
5 Nonlinear Optics
85
6 Filamentation versus Optical Breakdown in Bulk Transparent Media
109
7 Photophysics and Photochemistry of Ultrafast Laser Materials Processing
139
8 Formation of Subwavelength Periodic Structures Inside Transparent Materials
181
9 Xray Generation from Optical Transparent Materials by Focusing Ultrashort Laser Pulses
199
10 Femtosecond Laser Microfabrication of Photonic Crystals
239
11 Photophysical Processes that Lead to Ablationfree Microfabrication in Glassceramic Materials
287
12 Applications of Femtosecond Lasers in 3D Machining
341
13 Some Future Trends
379
Index
387
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About the author (2006)

Hiroaki Misawa is Professor at the Research Institute for Electronic Science at Hokkaido University, Sapporo, Japan. He obtained his B.Sc. in Engineering from the Department of Engineering at Tokyo Metropolitan University in 1979, graduated in Engineering from the University of Tsukuba in 1981 and completed his Ph.D. at the Department of Chemistry there in 1984. After postdoctoral positions at the Universities of Texas and Tsukuba and an Assistant Professorship at Tsukuba, he joined the Micro-photo-conversion project (Exploratory Research for Advanced Technology ERATO of Japan Science & Technology Agency JST). He then moved on to the Department of Engineering at the University of Tokushima in 1993 and was promoted to full professor in 1995. His current research interests include photochemistry, light-matter interaction, ultra-fast processes in materials, photonic crystals, and plasmonics. He has authored more than 200 papers.

Saulius Juodkazis is Associate Professor at the Research Institute for Electronic Science at Hokkaido University, Japan. He received his Physics Diploma in 1986 from Vilnius University, Lithuania, and was later confered a lecturer qualification in Physical Sciences. In 1997, he received his Ph.D. in Physics and Material Science jointly from Vilnius University and l'Universitä laude Bernard in Lyon, France, on the structural and optical properties of CdS doped waveguiding sol-gel films. From 1994, he worked as a researcher at the Semiconductor Physics Department, currently Institute of Material Science and Applied Research, of Vilnius University, and from 1997 to 2000 carried out post-doctoral research at Tokushima University, Japan. His current interests include space-time-spectrum-resolved characterization of light-matter interactions in micro-domains, nano-photonics/plasmonics, laser tweezers, and applications of ultra-fast laser pulses. He has published and co-authored more than 90 scientific papers.

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