A User's Guide to Ellipsometry
This book is specifically designed for the user who wishes expanded use of ellipsometry beyond the relatively limited number of turn-key applications. The book provides a concise discussion of theory and instrumentation before describing how to use optical parameters to determine material properties and optical parameters for inaccessible substrates and unknown films, and how to measure extremely thin films. The book also addresses polysilicon, a material commonly used in the microelectronics industry, and the effect of substrate roughness. This book's concepts and applications are reinforced through the 14 case studies that illustrate specific applications of ellipsometry from the semiconductor industry as well as studies involving corrosion and oxide growth.
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Chapter 2 Instrumentation
Chapter 3 Using Optical Parameters to Determine Material Properties
Chapter 4 Determining Optical Parameters for Inaccessible substrates and Unknown Films
Chapter 5 Extremely Thin Films
Chapter 6 The Special Case of Polysilicon
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