A User's Guide to Ellipsometry

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Academic Press, Dec 2, 2012 - Science - 260 pages
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This book is specifically designed for the user who wishes expanded use of ellipsometry beyond the relatively limited number of turn-key applications. The book provides a concise discussion of theory and instrumentation before describing how to use optical parameters to determine material properties and optical parameters for inaccessible substrates and unknown films, and how to measure extremely thin films. The book also addresses polysilicon, a material commonly used in the microelectronics industry, and the effect of substrate roughness. This book's concepts and applications are reinforced through the 14 case studies that illustrate specific applications of ellipsometry from the semiconductor industry as well as studies involving corrosion and oxide growth.

  • Allows the user to optimize turn-key operation of ellipsometers and move beyond limited turn-key applications
  • Provides comprehensive discussion of the measurement of film thickness and optical constants in film
  • Discusses the trajectories of the ellipsometric parameters Del and Psi and how changes in the materials affect the parameter
  • Includes 14 case studies to reinforce specific applications
  • Includes three appendices for helpful references
 

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Contents

Chapter 1Theoretical Aspects
1
Chapter 2 Instrumentation
19
Chapter 3 Using Optical Parameters to Determine Material Properties
35
Chapter 4 Determining Optical Parameters for Inaccessible substrates and Unknown Films
51
Chapter 5 Extremely Thin Films
65
Chapter 6 The Special Case of Polysilicon
82
Chapter 7 The Effect of Roughness
95
Case Studies
107
Appendices
231
Index
257
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