A User's Guide to Vacuum Technology

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John Wiley & Sons, Feb 18, 2005 - Science - 536 pages
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In the decade and a half since the publication of the SecondEdition of A User?s Guide to Vacuum Technology there havebeen many important advances in the field, including spinning rotorgauges, dry mechanical pumps, magnetically levitated turbo pumps,and ultraclean system designs. These, along with improved cleaningand assembly techniques have made contamination-free manufacturinga reality. Designed to bridge the gap in both knowledge andtraining between designers and end users of vacuum equipment, theThird Edition offers a practical perspective on today?s vacuumtechnology. With a focus on the operation, understanding, andselection of equipment for industrial processes used insemiconductor, optics, packaging, and related coating technologies,A User?s Guide to Vacuum Technology, Third Edition providesa detailed treatment of this important field. While emphasizing thefundamentals and touching on significant topics not adequatelycovered elsewhere, the text avoids topics not relevant to thetypical user.
 

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Contents

ITS BASIS
1
MEASUREMENT
79
PRODUCTION
181
MATERIALS
287
SYSTEMS
357
Symbols
459
APPENDIXES
461
Index
505
Copyright

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Modern Vacuum Physics
Austin Chambers
No preview available - 2004
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About the author (2005)

John F. O’Hanlon, PhD, is Emeritus Professor of Electrical and Computer Engineering at the University of Arizona in Tucson.

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