Advanced Mechatronics and MEMS Devices

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Dan Zhang
Springer Science & Business Media, Sep 14, 2012 - Technology & Engineering - 252 pages
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Advanced Mechatronics and MEMS Devicesdescribes state-of-the-art MEMS devices and introduces the latest technology in electrical and mechanical microsystems. The evolution of design in microfabrication, as well as emerging issues in nanomaterials, micromachining, micromanufacturing and microassembly are all discussed at length in this volume. Advanced Mechatronics also provides a reader with knowledge of MEMS sensors array, MEMS multidimensional accelerometer, artificial skin with imbedded tactile components, as well as other topics in MEMS sensors and transducers. The book also presents a number of topics in advanced robotics and an abundance of applications of MEMS in robotics, like reconfigurable modular snake robots, magnetic MEMS robots for drug delivery and flying robots with adjustable wings, to name a few.
 

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Contents

Chapter 1 Experience from the Development of a SiliconBased MEMS SixDOF ForceTorque Sensor
1
Chapter 2 Piezoelectrically Actuated Robotic EndEffector with Strain Amplification Mechanisms
25
Chapter 3 Autocalibration of MEMS Accelerometers
53
Chapter 4 Miniaturization of Micromanipulation Tools
89
Chapter 5 Digital Microrobotics Using MEMS Technology
99
Chapter 6 FlexureBased ParallelKinematics Stages for Passive Assembly of MEMS Optical Switches
117
Chapter 7 MicroTactile Sensors for In Vivo Measurements of Elasticity
141
Chapter 8 Devices and Techniques for Contact Microgripping
165
Chapter 9 A WallClimbing Robot with Biomimetic Adhesive Pedrail
179
Chapter 10 Development of Bioinspired Artificial Sensory Cilia
193
Chapter 11 Jumping Like an Insect From Biomimetic Inspiration to a Jumping Minirobot Design
207
Chapter 12 Modeling and H PID Plus Feedforward Controller Design for an Electrohydraulic Actuator System
223
Index
241
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