Advanced Mechatronics and MEMS DevicesDan Zhang Advanced Mechatronics and MEMS Devicesdescribes state-of-the-art MEMS devices and introduces the latest technology in electrical and mechanical microsystems. The evolution of design in microfabrication, as well as emerging issues in nanomaterials, micromachining, micromanufacturing and microassembly are all discussed at length in this volume. Advanced Mechatronics also provides a reader with knowledge of MEMS sensors array, MEMS multidimensional accelerometer, artificial skin with imbedded tactile components, as well as other topics in MEMS sensors and transducers. The book also presents a number of topics in advanced robotics and an abundance of applications of MEMS in robotics, like reconfigurable modular snake robots, magnetic MEMS robots for drug delivery and flying robots with adjustable wings, to name a few. |
Contents
Chapter 1 Experience from the Development of a SiliconBased MEMS SixDOF ForceTorque Sensor | 1 |
Chapter 2 Piezoelectrically Actuated Robotic EndEffector with Strain Amplification Mechanisms | 25 |
Chapter 3 Autocalibration of MEMS Accelerometers | 53 |
Chapter 4 Miniaturization of Micromanipulation Tools | 89 |
Chapter 5 Digital Microrobotics Using MEMS Technology | 99 |
Chapter 6 FlexureBased ParallelKinematics Stages for Passive Assembly of MEMS Optical Switches | 117 |
Chapter 7 MicroTactile Sensors for In Vivo Measurements of Elasticity | 141 |
Chapter 8 Devices and Techniques for Contact Microgripping | 165 |
Chapter 9 A WallClimbing Robot with Biomimetic Adhesive Pedrail | 179 |
Chapter 10 Development of Bioinspired Artificial Sensory Cilia | 193 |
Chapter 11 Jumping Like an Insect From Biomimetic Inspiration to a Jumping Minirobot Design | 207 |
Chapter 12 Modeling and H PID Plus Feedforward Controller Design for an Electrohydraulic Actuator System
| 223 |
| 241 | |
Other editions - View all
Common terms and phrases
acceleration vector accelerometer actuator actuator unit adhesion forces adhesive angles applications assembly axis biomimetic bistable modules calibration procedure capacitance cellular actuator chapter cilia compliance conference on robotics contact force developed digital microrobotics dimensions displacement EHA system elasticity electrodes end-effector equation error estimated etching fabricated feedforward feedforward controller fiber flexure force sensor forces and torques geckos gravity gripper hair IEEE IEEE international conference insertion jumping robot kinematics layer leafhopper linear LIS3L02AL ST manipulation maximum measured acceleration Mechatronics membrane MEMS accelerometers MEMS Devices MEMS sensor MEMS structure method micro microgripper micromanipulation nanotweezers noise obtained offset output parameters performance PID controller piezoelectric piezoelectric actuators piezoresistors polymer prototype PVDF receptor reprinted with permission rhombus robotics and automation rotation sensor element sensor model shown in Fig silicon simulation Springer Science+Business Media stiffness strain amplification substrate surface switch tactile sensor tissue transducer voltage